The compact inline AIH series CS-Heater quickly and accurately heats chemicals used for cleaning wafers and stripping resist in semiconductor manufacturing processes. Liquids pass in contact with high grade quartz glass tubes as high intensity halogen lamps radiate near infrared rays. Controlled temperature range is 50-170°C.
[Note: HTE Series #A421111H2000 (shell material of construction: HTPVC) replaces discontinued HTE Series CS Heater #A421111J1300 (shell material of construction: FRPP)]
Replacement heating lamp: QIR208V3190WDFL
Chemical |
Heating range |
Circulation flow rate per model |
AIH-33QS-UC |
AIH-63QS-UC |
AIH-93QS-UC |
AIH-123QS-UC |
Deionized water |
50~85℃ |
2.5 L/min or more
(approx. 0.66 gal/min or more) |
5 L/min and more
(approx. 1.32 gal/min or more) |
7.5 L/min and more
(approx. 1.98 gal/min or more) |
10 L/min and more
(approx. 2.64 gal/min or more) |
Ammonia with oxygenated water |
50~85℃ |
Hydrochloric acid with oxygenated water |
50~85℃ |
Sulfuric acid with oxygenated water |
50~140℃ |
Phosphoric acid |
50~170℃ |
10 L/min and more (approx. 2.64 gal/min or more) |