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» CVP Contouring Vertical Polisher
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CVP Wafer Contouring Vertical Polisher
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Wafer Edge Contouring Machine
This ground-breaking chamfering system can form a trapezoid or radius shape on the edge of an AS-slice
wafer
using the same resin-bonded wheel. Edge processing of the device wafer prior to BG decreases the amount of wafer breakage or chipping after BG. We also make a
Bevel machine
designed to form an edge on 2 inch to 8 inch diameter wafers. The Bevel Machine can process materials such as silicon, and many other semiconductive subtrates.
Contouring Vertical Polisher Machine Features
Two grinding stations
Enhanced processing accuracy and shortened processing time by using the Twin-contouring" method, compared to the conventional machine.
Reduced processing time compared to the conventional machine.
A built-in wafer profile measurement device is available.
Enables measurement of the cross-section profile after processing for feedback correction of the processing data.
Basic CVP Specifications
Wafer type: Notch
Wafer Size: 12 in or 8 in (selectable)
Loading/Unloading: 8-cassette or 2 dry stacks to 6-cassette or 4-cassette (or 2-casstte) (selectable)
Thickness Measurement Unit: Multi-point measurement
Fine alignment: Edge contact or non-edge contact
Qty of grid axis: Two stations
Spindle: [1] Horizontal circumference grinding (coarse) Metal-bonded wheel (100mm) (Optional), [2] Vertical circumference contouring (finish) Resin bonded wheel (60mm), [3] Vertical circumference contouring 2 (finish) Resin-bonded wheel (60mm) (Optional), [4] Notch grinding (horizontal)
Metal-bonded wheel (Optional)
Washing Unit: Included (Edge polishing, 2-fluid washing, high-pressure jet can be included.) (Optional)
Profile Measurement: Measurement items: cross-section profile, notch profile, diameter, notch vertical surface width
CVP-80
CVP-211B
CVP-310B
CVP-320
Wafer type
OF(CF) or Notch
OF(CF) or Notch
OF or Notch
Notch
Wafer size
2-inch to 8-inch
2-inch to 6-inch
12-inch or 8-inch, 6-inch
12-inch or 8-inch (selectable)
Loading/Unloading
None
4-cassette
4-cassette (or 2-cassette) or 1 dry stack-to-1 dry stack (selectable)
8-cassette or 2 dry stacks to 6-cassette or 4-cassette (or 2-casstte) (selectable)
Thickness measurement unit
None
Multi-point or a center point measurement (Optional)
Multi-point or a center point measurement (Optional)
Multi-point measurement
Fine alignment
Contact type
Edge contact or Non-edge contact
Edge contact or Non-edge contact (selectable)
Edge contact or Non-edge contact
Qty of grind axis
One station
One station
One station
Two stations
Spindle
[1] Horizontal circumference grinding (coarse)
Metal-bonded wheel (100mm) (Optional)
[1] Horizontal circumference grinding (coarse)
Metal-bonded wheel (100mm) (Optional)
[1] Horizontal circumference grinding (coarse)
Metal-bonded wheel (100mm) (Optional)
[1] Horizontal circumference grinding (coarse)
Metal-bonded wheel (100mm) (Optional)
[2] Vertical circumference contouring (finish)
Resin-bonded wheel (50mm)
[2] Vertical circumference contouring (finish)
Resin-bonded wheel (60mm)
[2] Vertical circumference contouring (finish)
Resin bonded wheel (60mm)
[2] Vertical circumference contouring (finish)
Resin bonded wheel (60mm)
[3] Vertical circumference contouring 2 (finish)
Resin-bonded wheel (60mm) (Optional)
[3] Vertical circumference contouring 2 (finish)
Resin-bonded wheel (60mm) (Optional)
[3] Vertical circumference contouring 2 (finish)
Resin-bonded wheel (60mm) (Optional)
[4] Notch grinding (horizontal)
Metal-bonded wheel (Optional)
[4] Notch grinding (horizontal)
Metal-bonded wheel (optional)
[4] Notch grinding (horizontal)
Metal-bonded wheel (Optional)
Washing unit
None
Included (Edge polishing, 2-fluid washing, high-pressure jet can be included.) (Optional)
Included (Edge polishing, 2-fluid washing, high-pressure jet can be included.) (Optional)
Included (Edge polishing, 2-fluid washing, high-pressure jet can be included.) (Optional)
Diameter measurement
None
Included
Included
Measurement items: cross-section profile, notch profile, diameter, notch vertical surface width
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LD/LED Processing
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Low Noise AC/DC Power Supply
Lithium Coin Cells
Specialty Power Supplies
Nonstop Power Supply
Laser Power Supply
Specialty Electrical Connectors
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FO, Coax, & Circular Connectors
Custom Made Electrical Connectors
Radar Sensor kit
Industrial Automation Components
Patlite
Panasonic Industrial Sensors
Isolation Transformer
Fluid Process Components
Liquid Monitoring
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Liquid Leak Detect Sensor
Swissflow Flowmeter
Flow Control
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Machine Vision Camera
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Tochigi Nikon
BlueVision Ltd.
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Medical Camera
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