Komatsu
Komatsu Electronics product line consists of the following products:
- Thermo Modules. Komatsu offers a wide selection of themo modules based on the Peltier principle which utilizes P and N type semiconductors. Three main categories include the Micro Module, Multi Purpose Module and the Multi Stage Module. These can be incorporated in many different electronic devices where local cooling, precise temperature control and compactness are required.
- Chemical Circulators. Komatsu's Chemical Circulator performs precision temperature control of chemicals used for RCA cleaning and wet etching. The material for heat transfer in contact with the liquid is made from high purity glass carbon and is free from contamination with dissolved metallic ions. Controlled temperature range is 15-50C.
- CS-Heater. The compact inline CS-Heater quickly and accurately heats chemicals used for cleaning wafers and stripping resist in semiconductor manufacturing processes. Liquids pass in contact with high grade quartz glass tubes as high intensity halogen lamps radiate near infrared rays. Controlled temperature range is 50-170C.
- DI Water Heater. The DI Water Heater heats purified water used to rinse Si wafers in the manufacture of semiconductor and glass substrates in the manufacture of LCDs. The halogen heating lamps are housed in transparent double walled high purity quartz glass tubes to efficient and non contaminant heating of ultra pure water. Controlled temperature range 25-85C. Flow rate range 2-10 Lit/min.
- Precise Air Conditioning Unit. The air conditioning unit performs precision control of temperatures and humidity of the clean air supplied into the spin coater cup, insuring uniform and highly reproducible photoresist characteristics.
- Re-Circulating Heating and Cooling Unit. With halogen lamps for heating and a proportional regulating valve for cooling to control the flow rate of circulating liquid and cooling water, the re-circulating heating and cooling unit performs flexible temperature regulation with high speed response.