| Process | Tool | Supplier | Model # |
| Inspection and Measurment | Cassette Loader | Daitron | |
| Other Equiment | Cassette Tilt | Daitron | Post CVD Inspection |
| Other Equiment | Wafer / Mask Stocker | Timec | |
| Polishing | Demounter | Daitron | |
| Polishing | Final Cleaning Machine | Daitron | |
| Polishing | Plate Handling System | Daitron | |
| Polishing | Backside Polisher | Fujikoshi | MCP-200 |
| Polishing | Double Sided Polisher | Fujikoshi | LPD-300 |
| Polishing | Polisher | Fujikoshi | SPM-19, 21, 23 |
| Polishing | Single Wafer Polishing Machine | Fujikoshi | MCP200 |
| Inspection and Measurment | Cassette Inspection Machine | Himec | CA-008, CA-008A |
| Inspection and Measurment | Epi Life Time Measuring Device | Kobe | LTA-1000EP/700 |
| Inspection and Measurment | Edge Profiler | Kobe | LEP-820, LEP-1200 |
| Inspection and Measurment | Flatness Tester, 12" | Kuroda | |
| Inspection and Measurment | Flatness Tester | Kuroda | Nanometro 300TT, LEP-820, LEP-1200 |
| Inspection and Measurment | Ultra Precision Surface Measure | Kuroda | Nanometro 330F |
| Inspection and Measurment | Bump Measuring System | Takaoka | |
| Inspection and Measurment | P/N Type Measuring Device | Napson | HPG-300A |
| Inspection and Measurment | Flatness Tester | Nidek | FT-90, FT-11, FT-17 |
| Inspection and Measurment | Inspection Microscope Systems | Daitron | |
| Inspection and Measurement | Wafer Edge Inspection | NED | Post CVD Inspection SSI-8 |
| Utility | Ionizer | Hugle | |
| Utility | Static Removal System | Dai-Nippon Ink | CO2 Bubbler |
| Process tool | Wafer Chip Sorter | Emtec | WCS-1215C |
| Process tool | Wafer Edge Oxidation Removal | Emtec | CVP |
| Transfer | FOUP-FOSB Transfer System | Daitron | |
| Inspection | Wafer Transfer / Inspection | Himec | DWL-300 |
| Process Equipment | Wafer Packing/Unpacking Machine | Himec | WT-8000 |
| Process Equipment | Wafer Jet Cleaner | Emtec | DJC-150A |
| Process Equipment | Wafer Jet Cleaner (Auto) | Emtec | AWS-200 |